Mass flow controller
申请(专利)号： US20010026519
专利号： US6755210B2 主分类号： G05D70/60 申请权利人： MKS JAPAN, INC. 公开国代码： US 优先权国家： JP
摘 要：
The present invention provides a high-performance mass flow controller which is compact and lightweight, which has a flow path having a simple structure and which does not have dead space in which a fluid is likely to stagnate and cause the
problem of contamination. A cylindrical valve conduit having a hollow structure, a yoke and a sensor conduit are connected in tandem. A fluid inlet portion is
connected to an end of the valve conduit and a fluid outlet portion is connected to an end of the sensor conduit. A solenoid valve is provided on a side of the fluid inlet portion and a thermal mass
flowmeter is provided on a side of the fluid outlet portion. In the valve conduit, a cylindrical plunger providing a movable portion of the solenoid valve and a valve portion of which a degree of opening is adjusted by moving the plunger are provided on a side of the fluid inlet
portion. A bypass for generating a laminar flow is disposed in the sensor conduit so as to effect one-way flow of a fluid. 主权项：
申请日： 2001-12-27 公开公告日： 2004-06-29
分类号： G05D70/60 发明设计人： ISAO SUZUKI 申请国代码： US
优先权： 20001228 JP 2000-402073
摘 要 附 图：
1. A mass flow controller for controlling a mass flow rate, in which a mass flow rate of a fluid is
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Mass flow controller
